JPH0127084Y2 - - Google Patents

Info

Publication number
JPH0127084Y2
JPH0127084Y2 JP1988006067U JP606788U JPH0127084Y2 JP H0127084 Y2 JPH0127084 Y2 JP H0127084Y2 JP 1988006067 U JP1988006067 U JP 1988006067U JP 606788 U JP606788 U JP 606788U JP H0127084 Y2 JPH0127084 Y2 JP H0127084Y2
Authority
JP
Japan
Prior art keywords
defect
scattered light
laser beam
width
maximum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988006067U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63148858U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988006067U priority Critical patent/JPH0127084Y2/ja
Publication of JPS63148858U publication Critical patent/JPS63148858U/ja
Application granted granted Critical
Publication of JPH0127084Y2 publication Critical patent/JPH0127084Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1988006067U 1988-01-21 1988-01-21 Expired JPH0127084Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988006067U JPH0127084Y2 (en]) 1988-01-21 1988-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988006067U JPH0127084Y2 (en]) 1988-01-21 1988-01-21

Publications (2)

Publication Number Publication Date
JPS63148858U JPS63148858U (en]) 1988-09-30
JPH0127084Y2 true JPH0127084Y2 (en]) 1989-08-14

Family

ID=30788233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988006067U Expired JPH0127084Y2 (en]) 1988-01-21 1988-01-21

Country Status (1)

Country Link
JP (1) JPH0127084Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439681A (en) * 1977-09-05 1979-03-27 Nippon Sheet Glass Co Ltd Distinguishing apparatus of defect kinds of glass sheet

Also Published As

Publication number Publication date
JPS63148858U (en]) 1988-09-30

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